Pressure propagation in encapsulated pressure sensor systems

Pressure Sensor for Exhaust Systems

Exhaust gas regulations for motor vehicles are becoming stricter year-after-year, and as internal combustion engines are being made more efficient and their exhaust gas reduced, there is increased demand for pressure sensing in the exhaust systems of diesel engine vehicles. Applying a single-chip semiconductor pressure sensor fabricated by a CMOS process, which has been successfully used for ma...

New Design of Mems piezoresistive pressure sensor

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...

Design of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire Pressure Sensor using Stepped Membrane

This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...

Selecting Pressure Sensor for Advanced Chromatography Systems

Modeling of capacitance and sensitivity of a MEMS pressure sensor

In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM).  It can b...